Edwards STP-XF803 Series - Page 18

STP Series Turbomolecular Pump
MT-00E-2A1-C
Page 12
INTRODUCTION
1
Item
Description
Function
1
Inlet port flange
Connected to the vacuum equipment (at the high vacuum
side).
2
TMS sensor connector
*1*2
A temperature sensor is attached for use with the TMS unit
only.
3
Cooling water port
*3
(water cooling unit)
Connected to the STP pump cooling water pipe. This port is
used when water cooling the STP pump or using the TMS
unit.
4
Outlet port flange
Connected to the inlet port side of the backing-pump.
5
STP connector
Connected to the STP connection cable.
6
Purge port
*4
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
The STP pump in Figure 11 is a typical pump model. Refer to the STP Pump Instruction Manual (B).
*1
Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
*2
Depending upon the pump model, the TMS sensor is built in the STP pump. Refer to the STP Pump Instruction Manual (B)
for more detailed information.
*3
Depending upon the pump model, the STP pump is not equipped with water cooling unit. Refer to the STP Pump
Instruction Manual (B) for more detailed information.
*4
Depending upon the pump model, the STP pump is not equipped with a purge port. Refer to the STP Pump Instruction
Manual (B) for more detailed information.