4: Data Files – Measurement / Validation
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The header portion contains information that was entered in the ‘Measurement/Validation
Information’ portion of the display for the particular test, along with other useful information
determined during the test. The header portion of the data file(s) consists of:
Measurement Data File Validation Data File
• Date/Time Date/Time
• Type (Measurement) Operator
• Tube Name Expected Thickness 1
• Operator Expected Thickness 2
• Tube SN (Serial Number) Measured Thickness 1
• Description Measured Thickness 2
• Sample Information
• Other Information
• Tube Material
• Test Status
• ni (refractive index of the air)
• ns (refractive index of the tube)
• ks (extinction coefficient of the tube)
• nf (refractive index of the deposit)
• kf (extinction coefficient of the deposit)
• DC Offset (offset of the photo diode in the dark)
• Lab Name
• City
• State
• Country
• Ellipsometer SN (Serial Number)
• Total Volume
• Max Ave Thickness
• Normalization Value
• Normalization Position
• Indexing Path
• Calibration Date
The data table portion of the measurement data file consists of thickness data for each slice and
position (as defined in the test configuration). For an ASTM D3241 test, the 24 slices will be from 0 -
360⁰ (increments of 15⁰) and the position (55 points) will be from 5 – 55 mm (increments of 1 mm).
Refer to Addendum ‘B’ for a partial sample of a data file.
The data table portion of the validation data file consists of Power for Wafer 1 & 2 for Angles [deg]
from 0⁰ thru 360⁰.
Note: Slice 0⁰ and 360⁰ represent the same slice.
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