FALEX 430 ETR - Specific for Validation with NIST Reference Tube

5: Maintenance /Service
46
Specific for Validation with Falex NIST Traceable Reference Tube
Message
Condition
Effect
Comments
Validation aborted
because of deviation
in measurement data
The deviation of the averaged
measurement curve to the single
curves is too big (more than 500
increments which are 0.038V)
The Validation will fail,
but the measured
curves are saved to the
HMI folder.
Inspect the Tube for dust/dirt
Refer to Addendum C: NIST
Reference Validation Tube
Care & Cleaning or Contact
Falex Rep/Compass Service
Validation aborted
because of Timeout
during edge detection
Edge Detection lasts longer
Than 15 seconds.
The Validation will be
aborted.
Refer to Section 3.5.7
‘Start Initialization’ or Power
cycle the unit or Contact
Falex Rep/Compass Service
Validation aborted
because of Timeout
during compensation
A timeout is hit during
Compensation.
The Validation will be
aborted.
Power cycle the unit
or Contact Falex Rep/Compass
Service
Validation aborted
because of Timeout
during Notch search
A timeout is hit during
Notch search.
The Validation will be
aborted.
Power cycle the unit
or Contact Falex Rep/Compass
Service
Validation aborted
because of Timeout
during Wafer
alignment
A timeout is hit during
Wafer alignment.
The Validation will be
aborted.
Power cycle the unit
or Contact Falex Rep/Compass
Service
Validation aborted
because of Timeout
during measurement
A timeout is hit during
measurement.
The Validation will be
aborted.
Power cycle the unit
or Contact Falex Rep/Compass
Service