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FALEX 430 ETR User Manual

FALEX 430 ETR
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FALEX 430 ETR
** Ellipsometric Tube Rater **
Operation Manual
Version: 2.1
Falex Corporation 1020 Airpark Drive Sugar Grove, IL 60554 630.556.3669 www.falex.com
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FALEX 430 ETR Specifications

General IconGeneral
BrandFALEX
Model430 ETR
CategoryMeasuring Instruments
LanguageEnglish

Summary

Forward

Safety Introduction

Information on safety precautions and operator responsibility.

Machine Safety Labels and Callouts

Explanation of safety labels used in the manual and on the machine.

General Information

Technical Specifications

Details on machine weight, footprint, working space, and utilities.

Equipment Description

Overview of the Falex 430 ETR test machine's purpose and features.

Packing List

List of items included in the startup kit and with the machine.

Initial Machine Setup

Instructions for uncrating, placing, and setting up the machine.

Getting to Know the Falex 430 ETR

Identification of key components like Control Panel and User Interface.

Laser Control Narrative

Explanation of the process for initiating laser emission and safety interlocks.

Laser Emission Interlocks

Details on wiring and software interlocks for laser safety.

Laser Safety Overview

General information about the Class 1 Laser Product designation and parameters.

Cabinet Housing Construction

Details on the materials and construction of the instrument housing.

Operation Testing

How the operator interacts with the system during testing.

Calibration Check

Procedure for verifying laser system accuracy using a reference tube.

Laser Labeling

Information on the Explanatory Label for the laser product.

Identification and Certification Label

Details and location of the product's identification and certification label.

Typical Test

Test Overview

General outline of the ASTM D3241 test method steps.

Heater Tube Preparation

Instructions for inspecting and preparing the heater tube before testing.

Heater Tube Installation

Steps for installing the heater tube into the machine.

Starting a Measurement Test

Steps to initiate and begin a measurement test using the software.

Detailed User Interface Features

Software Overview

Introduction to the Falex 430 ETR user interface and software functionality.

Display Architecture

Description of the three main areas of the user interface display.

Interface Functionality

How to select buttons, icons, and enterable fields on the interface.

Password Levels

Information on the two password levels (Service and Admin Mode).

Display Functionality Overview

Overview of the functionality of various displays.

Measurement Display

Details on the Measurement display's components and test duration.

Validation Display and Test

How to use the Validation display to check machine accuracy with a reference tube.

File Browser Display

How to organize, search, move, copy, and delete data and PDF files.

Activate Service Mode

How to access the Settings display using the Service Mode password.

Activate Admin Mode

How to access the Admin Mode display using the Admin password.

Settings Display

How to change measurement settings and other machine parameters.

Set Date and Time

How to adjust the system's date, time, time format, and time zone.

Admin Mode Display

How to control all parts of the Falex 430 ETR manually.

Data Files – Measurement / Validation

Data File Overview

Explanation of file naming formats and data file structure.

Maintenance and Service

Maintenance and Service Overview

General maintenance, cleaning, and service contact information.

Warning Messages

List of common warning messages and their causes/effects.

Error Messages

List of common error messages and their causes/effects.

Specific for Validation with NIST Reference Tube

Troubleshooting specific validation errors and their solutions.

Specific for FPGA Errors

List of FPGA errors, conditions, effects, and comments.

Addendums

Addendum A: Parts Listing

A list of part numbers and their descriptions for the Falex 430 ETR.

Addendum B: Sample Data File

Example of measurement and validation data file content.

Addendum C: NIST Reference Tube Care and Cleaning

Instructions for cleaning and maintaining the silicon wafers of the reference tube.