FALEX 430 ETR - Addendum B: Sample Data File

6: Addendums
49
Addendum B: Sample Measurement / Validation Data File
(Partial data files)
Measurement Date File Validation Date File (NIST Traceable Reference Tube)
Date 2/5/2018 08:26 Date Feb/01/2018 04:13:13 pm
Type Measurement Operator A. Technician
Tube Name Test 1 Expected Thickness 1 xxx.xx nm
Operator A. Technician Expected Thickness 2 xxx.xx nm
Tube SN 12345678 Measured Thickness 1 xxx.xx nm
Description Sample Test Measured Thickness 2 xxx.xx nm
Sample Information Specific test details can be entered here
Other Information Any other useful information can be entered here
Tube Material Aluminum
Test Status Complete - Pass
ni 1
ns 2.65
ks -9.4
nf 1.45
kf 0
DC Offset 0.00112
Lab Name Falex
City Sugar Grove
State Illinois
Country USA
Ellipsometer SN ETR_430-DXXXX
Total Volume 0.0142053
Max Ave Thickness 86.0872
Normalization value 9.51562
Normalization position 48
Indexing Path 57.4294
Calibration Date Feb/02/2018 01:38:53 pm
Non-Normalized Data Angle [deg] Power Wafer 1 Power Wafer 2
Slice/Position 0 ° ..…. 360 ° x.xxxxx x.xxxxx
5 mm - 54 mm
0 ° ..…. 345 °
2x3 Normalized Data
Slice/Position
5 mm - 53 mm
0 ° ..…. 345 °
3x2 Normalized Data
Slice/Position
5 mm - 52 mm
0 ° ..…. 345
6x1 Normalized Data
Slice/Position
5 mm - 52 mm
0 ° ..…. 345
Ellipsometric Angles (PSI,DELTA)
Slice/Position
5 mm - 54 mm
0 ° (psi, delta) … 345 ° (psi, delta)