Hitachi 3400-N User Manual

Using the Hitachi 3400-N VP-SEM
Before You Begin:
Sign in on the Calendar (we are pretty strict about this).
Wear gloves when handling anything that goes in the chamber such as stubs,
specimens, sample holders. Finger oils contaminate the machine and destroy image
quality.
Measure your sample’s diameter and height accurately:
Improper sample measurements will cause the sample to hit
the detectors and create thousands of dollars of damage!
Opening the Chamber to Load Specimens
(This may also be done later using the software)
1. Click the “AIR” button on the front of the machine
(push hard enough to hear vacuum change) (Fig. 1-A):
2. Wait a few minutes until you hear the machine beep
3. Insert sample holder. **For multi-holder, insert with
sample #1 facing blue pen mark in chamber**
4. Close the chamber and hold it shut with your hand.
Press “EVAC” button on front of machine (Fig. 1-B). Let go
of chamber door when vacuum engages it.
Starting PC-SEM:
5. Click the “PC-SEM” icon on the desktop. There is no
password.
6. When the PC-SEM finishes booting, you will see the
Specimen Dimensions window above (Fig. 2). Select the
correct Diameter/Size and Height (Fig. 2-A) for the
sample. Click OK.
7. On the right side of the screen are 4 overlapping control
panels -Condition, Image, Utility and Stage (Fig. 3). The
software will launch on the stage control panel as shown.
8. Check the other panels to be sure the last user left
this in the modes you want to use or you’ll have
difficulties and could damage your sample.
Figure 2. Specimen Size Setting
-A
Figure 3. Control Panels
EVAC AIR
-A B-
Figure 1. Front Panel Buttons

Hitachi 3400-N Specifications

General

Brand	Hitachi
Model	3400-N
Category	Microscope
Language	English

Summary

Before You Begin: Initial Setup and Safety

Safety and Sample Preparation

Essential precautions for handling specimens and ensuring accurate measurements to prevent damage.

Loading Specimens: Opening the Chamber

Chamber Opening Procedure

Step-by-step guide to safely open the SEM chamber for specimen loading.

Starting the PC-SEM Software

Software Initialization and Setup

Steps to launch the PC-SEM software and configure initial specimen settings.

Image and Condition Setup

Select Imaging Mode

Choose between Secondary Electron (SE) or Backscattered Electron (BSE) imaging modes.

Set Vacuum Mode

Configure the vacuum to SEM mode, not VP-SEM, for standard imaging.

Stage Control and Specimen Positioning

Set Stage Height (Z-position)

Adjust the stage height for optimal focus, depth of field, or EDAX analysis.

Sample Manipulation on Stage

Utilize stage controls to rotate, tilt, and move the specimen for feature inspection.

Multi-Holder Operation

Using the Stage Memory Function

Load and access pre-programmed sample positions using the stage memory feature.

Electron Beam Setup

Beam Settings Frame Configuration

Access and adjust key beam parameters like kV and probe current for specimen analysis.

Set Working Distance and Focus

Match working distance to stage height for beam focus and optimal imaging.

Turn ON Electron Beam

Activate the electron beam after chamber evacuation and await HV progress completion.

Auto-Saturate Filament (AFS)

Use AFS to auto-saturate the filament for stable electron emission.

Mechanical Aperture Selection

Choose the appropriate mechanical aperture size based on magnification for clear imaging.

Set Magnification and Initial Focus

Adjust magnification and use manual dial for initial specimen finding and focus.

Record Best Settings

Best Settings Log

Template to record optimal Kilovolts (KV) and Stage Height/WD settings.

Focus, Brightness and Alignment Setup

Start Scan and Auto Contrast/Brightness

Initiate scanning and use ABCC for automatic contrast and brightness adjustment.

Adjust Scan Speed and Image Display

Select scan speed for image refresh and adjust illumination using mechanical aperture.

Alignment Procedure Reminder

Note: Alignments are critical after KV, probe current, or aperture changes.

Multi-Step Focusing Process

Detailed steps for achieving optimal focus using magnification, focus, contrast, and stigmation controls.

Image Adjustment and Capture

Adjust Contrast and Brightness

Fine-tune contrast and brightness for optimal dynamic range after initial ABCC adjustment.

Select Scan Speed for Capture

Choose appropriate scan speed (Slow3/5) before capturing a high-resolution image.

Capturing and Saving Images

Image Capture Workflow

Steps for capturing an image, observing progress, and returning to live view.

Image Saving Options

Select thumbnails, embed annotations, and save images to the desired folder.

Manage Open Images and RAM

Limit the number of open images to prevent software freezing and clear RAM.

Changing Specimens and Shutdown

Turn OFF Electron Beam

Deactivate the electron beam before changing specimens or shutting down.

Prepare for Specimen Change or Shutdown

Open the chamber to air, set dimensions, and remove/store specimens.

Evacuate Chamber for Next Use or Shutdown

Evacuate the chamber after changing specimens or to initiate shutdown.

System Shutdown Procedure

PC-SEM Program Exit

Properly quit the PC-SEM software and sign out from the calendar.

File Transfer and Area Cleanup

Transfer files via Dropbox, ensure the computer remains ON, and clean the area.

Appendix 1: Align the Instrument

Mechanical Alignment

Adjust aperture controls to achieve the brightest beam for initial setup.

Begin Beam Alignment

Perform initial focus and stigmation before opening the alignment window.

Appendix 1 Continued: Alignment Steps

Aperture Alignment

Use 'Wobbler' mode to align the aperture for optimal image stability.

Beam Alignment Tilt and Shift

Adjust tilt and shift using stigmation knobs to achieve maximum brightness.

Stigma Alignment

Minimize rocking movement by adjusting stigmation dials and repeat Degauss if needed.

Appendix 2: Using Variable Pressure Mode

VP Mode Requirements

Utilize higher KV and probe current for viewing uncoated specimens in VP mode.

VP Mode Setup Procedure

Set up beam on SE mode first, then select VP-SEM and adjust vacuum to 30-50 Pa.

VP Mode Imaging Adjustments

Focus on Slow 1/2, adjust BSE Gain, and use COMP/TOPO/3D modes. Do not adjust stigmators.