EasyManua.ls Logo

Hitachi TM3030 Plus User Manual

Hitachi TM3030 Plus
384 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Page #1 background imageLoading...
Page #1 background image
INSTRUCTION MANUAL
FOR
MODEL TM3030Plus
TABLETOP MICROSCOPE
(USER’S OPERATION/MAINTENANCE EDITION)
・Before using the instrument, read the safety instructions and
precautions carefully.
・Be sure to follow the instructions and warning of instruction manual
and warning label.
・Keep this manual in a safe place nearby so it can be referred to
whenever needed.
Copyright C Hitachi High-Technologies Corporation 2014. May/2016 5th Edition
All rights reserved. Printed in Japan. Part No. 55E-8881-4 HR-G (HMS)

Table of Contents

Question and Answer IconNeed help?

Do you have a question about the Hitachi TM3030 Plus and is the answer not in the manual?

Hitachi TM3030 Plus Specifications

General IconGeneral
BrandHitachi
ModelTM3030 Plus
CategoryMicroscope
LanguageEnglish

Summary

IMPORTANT

Product Warranty

Details the warranty terms, coverage, and limitations for the microscope.

Warranty Limitations and Exclusions

Lists conditions and situations not covered by the warranty.

Installation and Relocation

Outlines instructions and procedures for system installation and relocation.

For the Safe Handling of the System

Precautions on Human Safety

Explains safety alert symbols (WARNING, CAUTION) and their meanings.

Precautions for Property and System Protection

Details safety notices (NOTICE, NOTE) for property and system protection.

General Safety Precautions

Covers safety notes on abnormal conditions, laser light, and device usage.

Warnings Provided in the Instruction Manual

Lists warnings described in the manual and their locations, including humid/dusty places and electric shock.

Warning and Caution Labels on System

Shows the locations and content of warning and caution labels affixed on the microscope unit.

Property and System Damage Prevention

Provides notices regarding power supply, cable connections, and detector care.

Proper System Usage and Damage Prevention

Covers application installation, PC screen settings, and handling PC freezing.

1 SPECIFICATIONS AND INSTALLATION CONDITIONS

1.5 Installation Conditions

Outlines environmental and physical requirements for the installation site, including amplitude and magnetic field.

2 INSTALLATION AND SETUP

2.3 Installation of the TM3030Plus Application Program

Provides precautions and steps for installing the TM3030Plus application software.

3 SYSTEM CONFIGURATION

4 OPERATIONS

4.2.1 Starting the System

Step-by-step guide on how to start the TM3030Plus system, including power and LED indicators.

4.2.2 Loading a Specimen and Adjusting its Height

Instructions and precautions for loading specimens and adjusting their height for observation.

4.2.3 Changing Specimens

Procedures for safely removing and replacing specimens in the microscope chamber.

4.2.4 Observation Condition Settings

How to select and adjust observation conditions like voltage, magnification, and mode.

4.2.5 Signal Select / Observation Mode Settings

Explains how to select image signals (BSE, SE, Mix) and observation modes.

4.2.6 Starting Observation

Steps to initiate image observation after system setup and specimen loading.

4.2.7 Searching for Field of View

Methods for locating the desired field of view using XY knobs or image shift.

4.2.8 Setting a Magnification

How to adjust the magnification using buttons, mouse dragging, or preset values.

4.2.9 Adjusting the Brightness / Contrast

Manual and automatic methods for adjusting image brightness and contrast.

4.2.10 Coarse Focusing

Procedures for manual and automatic coarse focusing to achieve a clear image.

4.2.11 Fine Focusing

Steps for manual fine focusing and astigmatism correction for sharp images.

4.2.12 Saving the Image Data

How to save captured images, including setting image properties and file format.

4.2.15 Shutting Down the System

Procedures for properly shutting down the microscope unit and the PC.

4.3.10 Start / Stop Button

How to start and stop the electron beam irradiation and observation process.

4.3.12 Observation Condition Selection Button

How to select observation conditions (5 kV, 15 kV, EDX) for optimal imaging.

4.3.13 Signal Select / Observation Mode Selection Button

How to select image signals (BSE, SE, Mix) and observation modes.

4.3.16 Magnification Button

How to change magnification using buttons, mouse dragging, or preset values.

4.3.18 Brightness Button

How to adjust image brightness manually or automatically.

4.3.19 Contrast Button

How to adjust image contrast manually or automatically.

4.3.20 Auto B/C Button

Automatically adjusts brightness and contrast for optimal image display.

4.3.21 Focus Button

How to adjust image focus manually using buttons or mouse dragging.

4.3.22 Auto Focus Button

Automatically adjusts image focus for clarity.

4.3.34 Auto B/C Adjustment Window

Adjusts brightness and contrast levels automatically for optimal image quality.

4.3.36 Beam Axis Alignment Window

Guides the user through aligning the electron beam axis for optimal performance.

4.3.38 Astigmatism Correction

Corrects electron beam distortion for clearer images, especially at high magnification.

5 MAINTENANCE

Filament Replacement

Instructions for replacing the electron source filament when it fails or is disconnected.

5.2 Beam Axis Alignment

Step-by-step guide for aligning the electron beam axis.

5.5 Error Messages

Lists potential error messages encountered during system operation and their countermeasures.

7 3D-VIEW (Option)

Calibration Menu Commands

Explains calibration commands for X, Y, Z measurements, and flatness correction.

7.14.1 Procedure of 3D-Image Capture

Step-by-step guide for capturing 3D images, including specimen height and insertion direction.

7.17.1 Measurement of Distance

How to measure distances and angles between points on an image.

7.22 Calibration of 3D Measurement

Operations for calibrating 3D measurement for improved accuracy, covering X, Y, Z, and Flat.

7.23 Setting of Calibration Condition

How to create, edit, and apply calibration conditions using the Condition table dialog.

7.24 Calibration Operations

Details calibration procedures for X, Y, Z, and Flat measurements.

7.24.1 Calibration of X, Y

Calibrates the horizontal (X) and vertical (Y) size of the image for accurate measurements.

7.24.2 Calibration of Z

Calibrates the height (Z-axis) measurement using a specimen with known height.

7.24.3 Calibration of Flat

Executes flatness calibration to correct sensitivity variations in the BSE detector.

7.25 Height Calibration Using a 30-degree Tilted Specimen Stub

Describes calibration methods using a tilted specimen stub for height measurements.

7.25.1 Example of Procedure for Flat Calibration by 30-degree Tilted Specimen Stub

Demonstrates flat calibration using a tilted specimen stub.

7.25.2 Example of Procedure for Z Calibration by 30-degree Tilted Specimen Stub

Demonstrates Z calibration using a tilted specimen stub after flat calibration.

Related product manuals