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1.5 Installation Condition
Install the TM3030Plus in the place of the following condition:
Table 1.5 Installation Conditions
Item Installation Conditions
General
requirements
1.
Flat location
2.
Avoid liquids
3.
Avoid external shock
4.
Avoid heat sources
5.
Avoid strong magnetic field (vertically from system: 15 mT, horizontally
from system: 5 mT
）
6.
Avoid strong electric field
7.
Avoid dust
8.
Avoid vibration (follow the instructions below)
Amplitude
(Vibration)
Meet the following amplitude value for the installation site. The allowable
value is defined as the amount of image blurring is 0.2 mm or less in
photography at a magnification of 5,000x.
Allowable amplitude value (*)
Frequency
7 Hz, 4.0 µm p-p or less
7 Hz < frequency
10 Hz, 1.5 µm p-p or less
10 Hz < frequency, 2.0 cm/s
2
or less
Magnetic
field
Meet the following stray magnetic field value for the installation site. The
allowable value of AC magnetic field is defined as the amount of image
distortion (elongation, shrinkage, or bending) is 0.5 mm or less in
photography at a specified magnification or specified focus position
(D=4.5 mm). If D becomes longer, it becomes the more susceptible to the
influence of a stray magnetic field, and the allowable value of stray
magnetic fields becomes smaller.
Allowable stray magnetic field for the TM3030Plus (*)
AC magnetic field
(nT)
DC magnetic field
fluctuation (nT)
(Peak-to-Peak)
Horizontal Vertical Horizontal Vertical
Accelerating voltage: 5 kV
Magnification: 2 kx
D
：
4.5 mm
376 607 425 686
Accelerating voltage: 15 kV
Magnification: 5 kx
D
：
4.5 mm
289 369 327 417
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