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1.3 Specifications
Table 1.3 Specifications
Item Product Specifications
1 Accelerating voltage 5 kV, 15 kV
2
Magnification 15x to 60,000x (image display magnification: 43steps (*1))
(digital zoom 2x, 4x), The minimum magnification depends
on the accelerating voltage, D (*2), and the screen size.
3
Maximum specimen
size
70 mm (diameter)
4
Maximum specimen
thickness
50 mm
5 Specimen stage X:35 mm, Y:35 mm (X, Y only)
6 Electron gun Pre-centered cartridge filament
7 Stigma correction coil Provided
8 Image shift ±50 μm (15 kV mode: D=4.5 mm)
9
Detector High-sensitivity semiconductor backscattered electron
detector
High-sensitivity secondary electron detector in the low
vacuum mode
10 Control CPU method Notebook PC + dedicated microcomputer control
11
Monitor
(recommended)
LCD attached to the notebook PC (15-inch screen)
12 Image data recording Hard disk mounted on PC, and other recording media
13 Recording pixels 1280×960 pixels (max.) / 640×480 pixels
14 Data display Micron marker, file No., date, comments
15 Automated function Auto brightness control, auto focusing adjustment
16
Auxiliary operation
function
Raster rotation
Magnification preset (2 steps)
17
Vacuum pump Compact turbo molecular pump: 30 l/s
Diaphragm pump: 1 m
3
/h
18 Vacuum detector Pirani gauge
19 Frequency 50/60 Hz
20
Main unit power
supply
AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA
Built-in earth leakage breaker (5 A/(15 mA)): 3P outlet
connection
21
Dimensions/weight Main unit:
330(W)×606(D)×565(H) 65 kg (manual stage)
330(W)×633(D)×565(H) 68 kg (motor drive stage)
Diaphragm pump: 145×256×217 4.5 kg
(*1) Magnification steps
15x, 18x, 20x, 25x, 30x, 40x, 50x, 60x, 80x, 100x, 120x, 150x, 180x, 200x, 250x, 300x,
400x, 500x, 600x, 800x, 1,000x, 1,200x, 1,500x, 1,800x, 2,000x, 2,500x, 3,000x,
4,000x, 5,000x, 6,000x, 7,000x, 8,000x, 9,000x, 10,000x, 12,000x, 15,000x, 18,000x,
20,000x, 25,000x, 30,000x, 40,000x, 50,000x, 60,000x
(*2) [D] denotes the distance between the specimen surface and the BSE detector.
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