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7.3 Specifications
1. 3D-Image Capture Function
Capture function: Auto capture of 4-element image data from a BSE detector
Capture resolution: Quick save (640 480 pixels)
Save (1,280 960 pixels)
Brightness adjustment: Automatic
2. 3D-Image Viewer Function
Import function: 4-element image data auto select/read function
(SEM condition auto import function)
Measurement performance: Depth accuracy: 20% (Reference)
(Magnification: 500x, Observation mode : [Standard],
Observation condition: [15 kV], Reference values by
measurement of Vickers impressions.)
Detectable angle range: 50° (Reference)
(Observation mode: [Standard])
NOTE
: In the case of the combination of [BSE] and [Charge-up Red.] from the Signal
Select and Observation mode respectively, or in the case where [5 kV] is
selected from the Observation condition, the measurement accuracy will be
deteriorated due to the effect of electron scattering.
NOTE
: It is not possible to utilize SE images or Mix images for 3D
display/measurement.
NOTE
: Measurement performance depends on the calibration accuracy, the condition
of the specimen, the observation magnification, the observation mode, and the
observation condition.
NOTE
: A steep topographical surface exceeding detectable angle might not be
displayed accurately.
Measurement function: Cross-sectional profile display
X, Y, Z, and Flat calibration functions
Measurement of distance in horizontal (X), vertical direction (Y),
length (lp) and angle between two arbitrary points that are
specified on the image.
Surface area measurement
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