Hitachi TM3030 Plus - Limited Life Parts

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6.2 Limited Life Parts
The parts which are regarded as limited life parts (See Table 6.2) must be replaced in the
specified interval. If the system is continuously used without properly replacing the limited life
parts, it may not only damage the system but cause safety problems. Contact the nearest
service office to schedule the replacements.
Table 6.2 Limited Life Parts List
Part No. Part Name Usage
Replacement
Interval
52E-6688 DFP maintenance kit For DFP maintenance 5 years
55E-1642 SR exhaust tube N assy Exhaust tube between turbo
molecular pump and diaphragm
pump
5 years
55E-1692 Exhaust tube Exhaust tube and sealing
component between turbo
molecular pump and specimen
chamber
5 years
55E-2681 Pirani gauge Vacuum level measurement
detector
3 years
51E-1492 Element Leak valve (V1) filter 5 years
55E-1317 Element (5) Slow leak valve (V2, V4) filter 5 years
55E-1171 Spring Specimen stage (For lock nut) 4 years
55E-2810 ACWHND00SP assy – 5 years
55E-2822 CONTROL20SP assy – 5 years
55E-2812 COLHVC00SP assy – 5 years
55E-2803 5CHAMP00SP assy – 5 years
55E-2824 IO-DRV10SP assy – 5 years
55E-1160 LED00SP assy – 5 years
55E-2806 ISAL00SP assy – 5 years
55E-2807 TMPMCONT00SP assy – 5 years
55E-2808 REGOUT00SP assy – 5 years
55E-2815 HVT3SP assy – 5 years
55E-2823 TMPMHVSP assy – 5 years
55E-2826 UVDAMPSP1 assy – 5 years
55E-2827 Photomultiplier assy – 5 years
55E-2602 NF cord assy – 5 years