Hitachi TM3030 Plus - Consumables; Replacement Parts

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6 REPLACEMENT PARTS
6.1 Consumables
Obtain the following consumables as needed to operate the system. (See Table 6.1.)
Table 6.1 Consumables
Part No. Part Name Usage Notes
50E-6159 Carbon seal Fixing specimen 20 sheets pack
G743002 Bamboo sticks For vacuum parts cleaning 10 sticks per package
S370057 Gauze For vacuum parts cleaning –
S269003 Aluminum foil For vacuum parts cleaning –
539-2132 Vacuum grease For vacuum sealing –
55E-1202 Objective aperture plate 0.15 mm diameter 1 piece
535-1289 Mono-porosity mesh
(made of MO)
For focusing aperture 20 sheets pack
51E-0240 Cartridge Filament Filament 10 pieces pack
– Ethyl alcohol For vacuum parts cleaning –
52E-6657 Fitting gloves For vacuum parts handling –
55E-1122 Objective lens unit For objective aperture –
55E-1123 Liner Tube For focusing aperture –