Hitachi TM3000 - User Manual

INSTRUCTION MANUAL
FOR
MODEL TM3000
TABLETOP MICROSCOPE
・Before using the instrument, read the safety instructions and
precautions carefully.
・Be sure to follow the instructions and warning of instruction manual
and warning label.
・Keep this manual in a safe place nearby so it can be referred to
whenever needed.
Copyright C Hitachi High-Technologies Corporation 2010.
All rights reserved. Printed in Japan. Part No. 55E-9001-1 HT-R (H-HMS)

Hitachi TM3000 Specifications

General

Accelerating Voltage	5 kV, 15 kV
Resolution	30 nm
Type	Tabletop Scanning Electron Microscope
Sample Size	70 mm diameter
Vacuum System	Turbo Molecular Pump
Image Capture	Digital image capture
Filament Type	Tungsten filament
Detector	Secondary Electron Detector (SED), Backscattered Electron Detector (BSED)

Summary

Important Information

Product Warranty

Details Hitachi High Technologies Corporation's warranty terms for the microscope.

Installation, Relocation, and After Service

Outlines procedures and requirements for system installation, relocation, and service.

System Specifications and Installation

Specifications Overview

Provides detailed technical specifications of the TM3000 Tabletop Microscope.

Installation Conditions

Lists environmental and site requirements for system installation.

PC Setup Requirements

Details the recommended PC specifications for system operation.

Operational Guides

Basic Operations

Explains fundamental mouse and keyboard operations for system use.

Image Saving Procedures

Covers steps for saving captured observation images in various formats.

Fine Focusing

Provides instructions on how to manually adjust image focus for clarity.

Maintenance and Replacement Parts

Filament Replacement

Provides instructions and precautions for replacing the microscope filament.

Beam Axis Adjustment

Details the process for aligning the electron gun axis for optimal performance.

Limited Life Parts

Lists parts requiring scheduled replacement based on usage intervals.