Hitachi S-4800 Quick Start Guide

HIGH RESOLUTION FIELD EMISSION
SCANNING ELECTRON MICROSCOPE: HITACHI S-4800
BEAM ALIGNMENT PROCEDURE
1. Set V
acc
and I
e
to desired value.
2. Move stage to desired working distance with Z manual knob on sample chamber.
The distance is in mm; this is the distance between the pole piece and the sample
surface.
3. Under the SEM tab in the software interface, set WD (working distance).
4. Select focus mode UHR.
5. Press F2 on the keyboard while the cursor is over the view window to degauss the
objective lens. This should be done every time focus is greatly changed (by changing
working distance), or V
acc
or I
e
are changed.
6. Adjust FOCUS/BRIGHTNESS/CONTRAST knobs to obtain the best image
possible.
7. Check that I
e
has not dropped from selected value. If it has, press SET.
8. Click Align button along top row of screen to open align dialog box.
Note: In general you want to align the beam at twice the magnification that you will
be using for your images.
9. Align beam:
a. Click the Beam Align radio button.
b. Adjust BRIGHTNESS/CONTRAST knobs to obtain a clear disc. Use
STIGMA/ALIGNMENT knobs X and Y to center disc on the target.
10. Align aperture:
a. Click the Aperture Align radio button.
b. Use STIGMA/ALIGNMENT knobs X and Y to minimize motion in image.
11. Align Stigma Align.X and Stigma Align.Y:
a. Click the Stigma Align.X radio button.
b. Use STIGMA/ALIGNMENT knobs X and Y to minimize motion in image.
c. Repeat for Stigma Align.Y radio button.
12. Select Off radio button to turn off alignment functions.

Hitachi S-4800 Specifications

General

Brand	Hitachi
Model	S-4800
Category	Microscope
Language	English