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Inficon MPG400 - MPG400 Cleaning and Repair

Inficon MPG400
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18
tina48e1-c (2017-10) MPG400-401.om
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling cleaning agents and disposing of them. Consider
possible reactions with the product materials ( 7).
We recommend replacing the Pirani element when cleaning the gauge.
Allen wrench AF 1.5
Allen wrench AF 3
Open-end wrench 7 mm
Pliers for circlip
Polishing cloth (400 grain) or Scotch-Brite
Tweezers
Cleaning alcohol
Mounting tool for ignition aid
Ignition aid
Pirani element (13) incl. FPM seal (13a)
FPM seal (11) for anode feedthrough
6
3
2
4
1
5
7
13
13a
8
8a
9
10
11
12
10a
Remove the gauge from the vacuum system ( 15).
Unfasten the hexagon socket set screw (1) on the electronics unit (2).
Remove the electronics unit without twisting it.
The cover of the electronics unit cannot be removed.
6.2 Cleaning MPG400,
Replacing Parts
Tools / material required
6.2.1 Disassembling MPG400

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