Inficon MPG400 - Appendix; A: Measuring Signal Vs. Pressure

tina48e1-c (2017-10) MPG400-401.om 29
Appendix
p = 10
1.667U-d
⇔
U = c + 0.6log
10
p
p U c d
[mbar]
[Torr]
[Pa]
[V]
[V]
[V]
6.8
6.875
5.6
11.33
11.46
9.333
where p pressure
U measuring signal
c, d constant (pressure
unit dependent
valid in the range 5×10
-9
mbar < p
3.8×10
-9
Torr < p
5×10
-7
Pa < p
<1000 mbar
<750 Torr
<1×10
5
Pa
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0
0.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5
9.5 10.5
sensor error
underrange
sensor error
overrange
Pa
mbar
torr
Measuring signal U
[
V
]
Pressure p
Meas. signal U [V] Pressure p [mbar] Pressure p [Torr] Pressure p [Pa]
<0.5 Sensor error
0.5 … 1.82 Underrange
1.82
2.0
2.6
3.2
3.8
4.4
5.0
5.6
6.2
6.8
7.4
8.0
8.6
5.0×10
-9
1.0×10
-8
1.0×10
-7
1.0×10
-6
1.0×10
-5
1.0×10
-4
1.0×10
-3
1.0×10
-2
0.1
1.0
10
100
1000
3.8×10
-9
7.5×10
-9
7.5×10
-8
7.5×10
-7
7.5×10
-6
7.5×10
-5
7.5×10
-4
7.5×10
-3
7.5×10
-4
0.75
7.5
75
750
5.0×10
-7
1.0×10
-6
1.0×10
-5
1.0×10
-4
1.0×10
-3
1.0×10
-2
0.1
1.0
10
100
1000
1.0×10
4
1.0×10
5
8.6 … 9.5 Overrange
9.5 … 10.5 Sensor error (Pirani defective)
A: Measuring Signal vs.
Pressure
Conversion formulae
Conversion curves
Conversion table