Inficon MPG400 - B: Gas Type Dependence

30
tina48e1-c (2017-10) MPG400-401.om
Pressure indicated (gauge calibrated for air).
p (mbar)
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
H
2
He Ne
Air
N
2
O
2
CO
10
–3
24
6
10
–2
10
–1
10
0
10
1
10
2
8
24
68
24
68
24
68
24
68
Water vapor
p
eff
(mbar)
Indication range
above 10
-2
mbar
Xe
Kr
Ar
CO
2
Freon 12
Pressure indicated (gauge calibrated for air).
6
4
2
6
4
2
6
4
2
10
–4
8
6
4
2
10
–6
246
10
–5
10
–4
Ar
10
–5
8
6
4
2
10
–6
8 2 468 2 46 2 46 2 46
10
–3
8
10
–2
8
10
–1
8
10
–3
8
10
–2
8
10
–1
8
p
eff
(mbar)
p (mbar)
Indication range
10
-6
... 10
-1
mbar
Air
N
2
O
2
CO
He
B: Gas Type Dependence
Indication range above
10
-2
mbar
Indication range
10
-6
… 0.1 mbar