LEYBOLD 141 00 - Operation of the UL 200

8
TH 10.211/8.02 - 12/97
2 Operation
Fig. 3 Instrument views
Key to Fig. 3
1 Hand unit
2 Test connection
3 Electronics cover
4 VENT input
5 Connection for exhaust line
6 Gas ballast connection
7 Mains switch with mains fuses
8 Mechanical cover
9 Openings for removal of the
mechanical cover
10 RS 232 C interface (SERIAL)
11 Chart recorder output (RECOR)
12 Control inputs and outputs
(CONTROL)
13 Connection for the
Accessories (OPTION)
4
5
6
7
8
9
1
2
3
1
2
10
12
11
13
Mechanical side
Electronics side
MS
5
6
8
9
1
2
3
4
12
11
13
15
14
16
10
7
Key to Fig. 2
1 Calibrated leak (optional)
2 Valve for the calibrated leak (V 7)
3 Inlet valve (V 2.a)
4 Pirani gauge p
V
5 Inlet valve (V 2.b)
6 Turbomolecular pump (TMP)
7 Mass spectrometer
8 Inlet valve (V 4)
9 Partial flow pump set (optional)
10 Venting valve (V 3)
11 Connection flange
12 External partial flow valve (V 8) (optional)
13 Pirani gauge p
E
14 Evacuation valve (V 1)
15 External partial flow pump (optional)
16 Forevacuum pump
Fig. 2 Vacuum diagram