Safety Information
9300750767_002_C3 - 12/2020 - © Leybold
0.4 Danger through materials and substances
1 Danger due to a sharp increase in pressure due to the decomposition
of pumped gases. Uncontrolled emission of process gases by reaction
products within the pump.
The pumping of reactive gases, vapours or gas mixtures is generally
prohibited. The operator is responsible for assessing the hazard poten-
tial of the process media or mixtures.
2 Danger of escaping or emitting pumped hazardous gases, vapours or
substances. Pumped process gases may escape from the exhaust
and leaks in the vacuum system. The pumping of toxic / explosive /
flammable / pyrophoric / radioactive / oxidizing / corrosive gases or
gas mixtures, as well as oxygen of more than atmospheric concentra-
tion (21 %) is generally prohibited. The operator is responsible for
assessing the hazard potential of the process media or mixtures.
3 Some pumps use perfluoropolyether (PFPE) as lubricant.
When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and
corrosive gases are released. When handling PFPE keep it away from
open fires. Do not smoke with PFPE on your fingers.
Touch the inner sections of the pumps only while wearing clean gloves,
and use clean tools;
do the necessary work in clean and dry rooms;
after having removed the pump from its packaging, start it up as
quickly as possible;
as cleaning agents solvents based on hydrofluorether compounds may
be used.
4 Fluoropolymers are used as sealants (FKM) and as lubricants (PFPE) in
the pumps. In case the pump suffers a severe mechanical failure, the
possibility of hazardous substances being released owing to their ther-
mal decomposition cannot be excluded. The hazards caused by such
decomposition are described in the Material Safety Data Sheets for the
materials, for example.
0.5 Noise Hazard
1 Hearing loss due to high noise levels.
Depending on the operating conditions, higher noise levels can be
reached than specified in the technical data. Take suitable hearing pro-
tection measures.
Pressure values in bar or mbar are absolute pressures, unless expressly stat-
ed otherwise (e.g. bar(g)).
DANGER
CAUTION
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