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LEYBOLD MAG.DRIVE digital User Manual

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v
acuum
OPERATING INSTRUCTIONS
GA05141_0702
Turbomolecular Pumps
with Magnetic Bearing
MAG.DRIVE
digital
Electronic Frequency Converter
LINE
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LEYBOLD MAG.DRIVE digital Specifications

General IconGeneral
BrandLEYBOLD
ModelMAG.DRIVE digital
CategoryWater Pump
LanguageEnglish

Summary

Safety Information

General Safety Precautions

Procedures to prevent hazards to persons and damage to equipment.

Qualified Personnel and ESD Safety

Information on qualified personnel and electrostatically sensitive devices (ESD) safety.

Description

System Overview

Components of the Leybold MAG pumping system, including turbo pump and converter.

MAG.DRIVE digital Converter Function and Design

Explains the converter's function, housing, front and rear panel.

Installation

MAG W 830 C Installation Details

Installation guide for MAG W 830 C, including connection elements and fixing.

MAG W 1300 C Installation Details

Installation guide for MAG W 1300 C, covering connection elements and flanges.

MAG (W) 1500 CT Installation Details

Installation steps for MAG (W) 1500 CT, including connections and flange types.

MAG W 2200 C Installation Details

Installation guide for MAG W 2200 C, focusing on connection elements and guards.

MAG W 2800 C, CT Installation Details

Installation guide for MAG W 2800 C/CT, covering connection elements and mounting.

MAG W 3200 CT Installation Details

Installation guide for MAG W 3200 CT, focusing on connection elements and flange mounting.

MAG W 830 Installation Details

Installation guide for MAG W 830, covering connection elements and splinter guard.

MAG W 1300 Installation Details

Installation guide for MAG W 1300, covering connection elements and guards.

MAG W 2200 Installation Details

Installation guide for MAG W 2200, covering connection elements and guards.

MAG W 2800 Installation Details

Installation guide for MAG W 2800, covering connection elements and splinter guard.

Connecting to the Vacuum Chamber

Instructions for connecting the pump to the vacuum chamber, including splinter guard.

Connecting the Backing Pump

Details on selecting and connecting backing pumps and system layout.

Connecting the Cooling Water

Specifications and guidelines for connecting the cooling water system.

Connecting the Purge Gas

Instructions for connecting purge gas, suitable gases, and monitoring flow.

Operation

Maintenance

Troubleshooting

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