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LEYBOLD MAG W 1300 C User Manual

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v
acuum
OPERATING INSTRUCTIONS
GA05141_0702
Turbomolecular Pumps
with Magnetic Bearing
MAG.DRIVE
digital
Electronic Frequency Converter
LINE
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LEYBOLD MAG W 1300 C Specifications

General IconGeneral
BrandLEYBOLD
ModelMAG W 1300 C
CategoryWater Pump
LanguageEnglish

Summary

Safety Information

General safety information

General safety instructions and precautions for operating the pump.

Description

1.1 System overview

Overview of the turbomolecular pump and frequency converter components.

1.4 Function and design of the MAG.DRIVE digital

Explanation of the frequency converter's functions and physical design.

Installation

2.3 Connecting the MAG to the vacuum chamber

Instructions for attaching the pump to the vacuum system, including safety.

2.4 Connecting the backing pump

Steps for connecting the required backing pump to the turbomolecular pump.

2.5 Connecting the cooling water

Details on cooling water specifications and connections for the pump.

2.6 Connecting the purge gas

Procedures and guidelines for connecting the purge gas supply.

Operation

3.1 General operation rules

Fundamental rules for safe and effective operation of the turbomolecular pump.

Troubleshooting

5.1 Warning messages

List of warning messages, their causes, and suggested measures.

5.2 Failure messages

List of failure messages, their causes, and troubleshooting steps.

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