GA05141_0702 - 09/2004
103
Troubleshooting
Malfunction
Converter dead, LED “mains”
does not light up after swit-
ching on.
Display malfunction, confu-
sing messages. No reaction
when pressing keys.
Vacuum chamber pressure
rises above normal backing
pressure while the pump is
stopped.
No purge gas flow
Base pressure not reached.
MAG CT does not heat up.
Display blurred.
One or two high-frequency
sounds every 4 to 7 minutes;
display changes for a short
time.
The values for frequency set-
point or normal operation are
reset to standard values after
the frequency converter has
been changed.
Measures
Check the line voltage.
Contact Leybold service.
Switch the converter off and on again. If the
converter still malfunctions contact Leybold
service.
Open and close purge gas and/or venting
valve via control plug X14. LED on the valve
must light up and a clicking noise can be
heard. Foreline pressure drops while the valve
is closed.
Set purge flow according to specification.
Open and close purge gas and venting valve
via control plug X14. LED on the valve must
light up and a clicking noise can be heard.
Foreline pressure drops while the valve is clo-
sed.
Leave the pump system run for 3 to 5 hours
to reach a pressure below 10
-5
mbar.
See TMS failures.
Operate the converter according to the speci-
fications.
No measures required.
Accept default values or set new values; see
Sections 3.10 and 4.4.
Possible Cause
No power supply.
Fuse F1 blown or converter failure.
Converter failure.
Purge gas and venting valve open or
malfunctioning.
Valve malfunctioning.
Degassing surfaces of rotor and stator. If
the pump was stored in a humid environ-
ment or was exposed to humid ambient
air all surfaces will be covered with con-
densation.
TMS failure.
Ambient temperature too high or too low.
This is no malfunction but a routine
check of the overspeed protection.
The new frequency converter has a
default value for stand-by operation that
overlaps with the normal operation
threshold.
5.3 Malfunctions
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