Installation
12 300758785_002_C1 - 06/2019 - © Leybold
3.2.1 Non-conforming Use
The ECODRY plus is not suited for use in short cycle pump processes with
high repetition rates (pick-and-place, loadlock, for example).
The ECODRY plus is not suited for pumping of:
■ Radioactive substances
■ Explosive substances
■ Ignitable gas mixtures
■ Pyrophorous gases
■ Liquids
■ Media condensing in the pump
■ Solids/dusts
■ Oxidative substances with the exception of ≤ 21% oxygen in the air
■ Toxic gases belonging to GHS category I and II*
Pumping of the following gases is only permissible after having consulted
Leybold first:
■ corrosive gases
■ toxic gases belonging to GHS category II and IV*
*Globally Harmonized System of Classification, Labelling and Packaging of Chemicals
DANGER
Fig. 3.2 Cooling air flow
Cooling air OUT
Air temperature < 70 °C
Cooling air IN
Cooling air IN
> 100 mm> 100 mm
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