0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120 °C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
0.6 Dangers in connection with safety-related
measures and precautions
1 The frequency converter is not equipped with its own emergency shut
down switch. Such a facility needs to be provided from the side of the
system.
0.7 Risk of damaging the pump
1 Never touch the rotor. Touching the rotor may cause injury and
damage the rotor bearing.
2 Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet screen
are excluded from warranty.
3 The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4 Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (yellow power LED off). Other wise there is the risk of dam-
aging the frequency converter.
5 Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
CAUTION
CAUTION
NOTICE
To Next Page
Loading...
