Use two flat blade screwdrivers and insert these into the
openings (6/9) and lever the cover for the mechanical
section out at the bottom.
In doing so, the cover should at first be moved somewhat
to the front by the downward motion of the screwdrivers
(7/1). Then cover may be lifted up by the upwards moti-
on (7/2) of the screwdrivers so that the cover is disenga-
ged completely.
Then pull the cover off the mechanical section up to its
stop and remove it to the front.
After completion of all maintenance work the cover of the
mechanical section (6/8) must engage properly in the
openings (6/9) at the bottom.
Removing the cover (6/3) for the electronics section.
Detach the hand unit (6/1). Pull the cable for the hand
unit out of its container on the UL 200.
Remove the cover for the mechanical section (6/8) as
described above.
Remove the four Phillips screws (6/10).
Pull the cover of the electronics section (6/7) back to the
rear and place it aside.
3.2.2 Exchanging the Filter Mats
The filter mats have been built-in to filter the dust out of
the air which is taken in. In order to ensure that the filter
mats will not throttle the air flow and so that sufficient
cooling is possible at all times, the filter mats should be
cleaned or exchanged as soon as these have attained a
dark grey colour.
Filter mats are used at three places within the UL 200.
a.) at the ventilation slit behind the attached hand unit
(only partly visible from the outside)
b.) on the face side to the back (only partly visible from
the outside)
c.) at the fan of the turbomolecular pump (not visible
from the outside).
To exchange the filter mats remove the covers (see
Chapter 3.2.1).
Filter mat a.) This filter mat is attached to the cover of
the electronics section by means of a
metal grid. Unscrew the grid and exchan-
ge the filter mat.
Filter mat b.) This filter mat is located on the side
together with a further metal grid in a
recess. It can be exchanged without
having to use any tools.
Filter mat c.) This filter mat is fixed in place by the fan of
the turbomolecular pump. Unscrew the
two screws which attach the fan and
exchange the filter mat.
Under certain circumstances a dirty mat may be cleaned
by shaking the dust out or by using a vacuum cleaner so
that the filter mat may be reused.
3.2.3 Exchanging the Oil
Remove the cover of the mechanical section (2/8) as
described in Chapter 3.2.1.
Warning Before starting with any disassembly
work on the pumps, pull the mains plug
first. When the pump has been pumping
hazardous substances, determined the
kind of hazard first and ensure that sui-
table safety precautions are taken.
Observe all safety regulations!
Caution When disposing of waste oil you must
observe the applicable regulations for
the safety of the environment!
The type of maintenance work and the maintenance
intervals as well as the oil change procedure are descri-
bed in the corresponding Operating Instructions and
32
TH 10.211/8.02 - 12/97
Fig. 7 Disengaging the cover of the mechanical section
1
2
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