61
Technical Data for FMA-1600A-LSS Mass Flow Meters
0 Air Air
1 Argon Ar
2 Methane
3 Carbon Monoxide CO
Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane
Acetylene C2H2
15 Ethylene
16 iso-Butane
Krypton Kr
18 Xenon Xe
19 SF6
20 C-25
21 C-10
22 C-8
23 C-2
25
26 A-25
A1025
28
Star29
29 P-5
30 Nitric Oxide NO
31 NF3
32 Ammonia NH3
33 Chlorine Gas Cl2
H2S
35 Sulfur Dioxide SO2
36 Propylene C3H6
in an inert carrier
NO2
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