Omega Engineering FMA-1600A Series User Manual

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1.050in
26.67mm
3.81mm
.150in
.35in[8.89mm]2X 8-32 UNC
.925in
56.52mm
23.50mm
2.225in
.125in
3.18mm
.525in
13.34mm
.350in
8.89mm
13.34mm
.525in
.350in
8.89mm
1/8 NPT
Both Sides
2.375in
60.33mm
4.567in
116mm
DATE
12/11/2015
MS-20SLPM-D-MSPEC
REV.
1
100 sccm to 20 slpm approximate shipping weight: 1.0 lb
0.5 sccm to 50 sccm approximate shipping weight: 0.8lb
8.53mm
Both Sdes
M5X0.8 (10-32 UNF)
.336in
.525in
13.34mm
3.18mm
23.50mm
.125in
56.52mm
2.225in
.925in
.150in
3.81mm
2X 8-32 UNC .175in[4.45mm]
1.050in
26.67mm
60.33mm
2.375in
4.397in
111.68mm
8.53mm
.336in
.525in
13.34mm
DATE
MS-0.5SCCM-D-MSPEC 1
12/10/2015
REV.
FMA-1600A-LSS
0 – 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
FMA-1600A-LSS
0 – 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
0 – 20 slpm

Omega Engineering FMA-1600A Series Specifications

General

Brand	Omega Engineering
Model	FMA-1600A Series
Category	Measuring Instruments
Language	English