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GSD 350
Pfeiffer Vacuum GSD 350 - User Manual
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OPERATING INSTRUCTIONS
EN
Translation of the Original
GSD 350 OMNISTAR/THERMOSTAR
Gas analysis system
2
Table of Contents
Main Page
Table of contents
3
List of tables
7
List of figures
8
1 About this manual
10
1.1 Validity
10
1.1.1 Applicable documents
10
1.1.2 Variants
11
1.2 Target group
11
1.3 Conventions
12
1.3.1 Instructions in the text
12
1.3.2 Pictographs
12
1.3.3 Stickers on the product
12
1.3.4 Abbreviations
13
1.4 Trademark proof
14
2 Safety
15
2.1 General safety information
15
2.2 Safety instructions
15
2.3 Safety precautions
18
2.4 Proper use
19
2.5 Foreseeable improper use
19
2.6 Responsibilities and warranty
19
2.7 Owner requirements
19
2.8 Personnel qualification
20
2.8.1 Ensuring personnel qualification
20
2.8.2 Personnel qualification for maintenance and repair
20
2.8.3 Advanced training with Pfeiffer Vacuum
21
2.9 Operator requirements
21
3 Product description
22
3.1 Functional description
22
3.2 Controls and indicators
23
3.3 Layout of the unit
24
3.3.1 Basic unit
24
3.3.2 Terminal area
25
3.3.3 Gas inlet system
25
3.3.4 Calibration unit
27
3.3.5 High vacuum system
27
3.3.6 Fore-vacuum system
28
3.3.7 Sealing gas system
28
3.3.8 Gas analysis unit
29
3.3.9 Heating and insulation
30
3.3.10 Electronic components
32
3.4 Interfaces and connections
33
3.4.1 Mains power supply
33
3.4.2 Ground terminal
33
3.4.3 "USER IO" connection
34
3.4.4 "AUX IO" connection
35
3.4.5 "Ethernet" (LAN) connection
36
3.5 Identifying the product
36
3.6 Scope of delivery
37
4 Transport and storage
38
4.1 Transporting the product
38
4.2 Storing the product
38
5 Installation
40
5.1 Ensuring venting of the unit
40
5.2 Establishing mains connection
41
5.3 Establishing the Ethernet connection
41
5.4 Connecting the exhaust duct
41
5.4.1 Trimming the exhaust gas hose
41
5.4.2 Connecting/disconnecting the exhaust gas hose
42
5.5 Connecting the sealing gas line
43
5.5.1 Trimming the sealing gas hose
43
5.5.2 Connecting/disconnecting the sealing gas line
43
5.6 Connecting the capillary
44
5.6.1 Connecting the stainless steel capillary
45
5.6.2 Connecting the quartz capillary
45
5.7 Adjusting the position of the capillary hose
45
5.8 Establishing a network connection
46
5.8.1 IP addresses
46
5.8.2 Sub-networks
47
5.8.3 Changing the IP address of the unit
47
5.8.4 Changing the host computer IP address
48
5.9 Installing the PV MassSpec software
48
6 Commissioning
49
6.1 Switching on the device
49
6.2 Starting the pumping system
49
7 Operation via the display
51
7.1 "Dashboard" screen
51
7.2 "Info" menu
53
7.3 "Settings" menu
53
7.3.1 Creating and editing measurement recipes
55
7.3.2 Adjusting the heating units
56
7.3.3 Adjusting the sensors
57
7.3.4 Setting the language
58
7.3.5 Setting autostart functions
58
7.3.6 Setting the network parameters
59
7.3.7 Adjusting the GSD system parameters
59
7.3.8 Resetting the unit to the factory settings
60
7.3.9 Service
60
7.4 "Messages" menu
60
7.5 "Control" menu
60
7.5.1 Pumping down the vacuum system
61
7.5.2 Venting the vacuum system
61
7.5.3 Switching the heating units on and off
62
7.5.4 Opening and closing the gas inlet (OmniStar)
62
7.5.5 Baking out the vacuum chamber
62
7.5.6 Switching emission on and off
63
7.5.7 Switching the electron multiplier on and off
63
7.5.8 Opening and closing the calibration valve
64
7.6 "Measurement" menu
64
8 Decommissioning
65
9 Maintenance
66
9.1 Maintenance work and intervals
66
9.2 Maintaining the basic unit
68
9.2.1 Removing/attaching the gas inlet cover
69
9.2.2 Removing/attaching the side covers
69
9.2.3 Removing/attaching the housing cover
70
9.2.4 Cleaning housing parts
71
9.2.5 Cleaning the protection screens on the fans
72
9.3 Maintaining the high vacuum system
73
9.3.1 Replace operating fluid reservoir on turbopump
73
9.3.2 Replace venting valve
73
9.4 Maintaining the fore-vacuum system
75
9.4.1 Replacing the diaphragm pump
75
9.4.2 Replace diaphragm pump diaphragms
76
9.5 Maintaining the gas analysis unit
77
9.5.1 Maintaining the QMA 250 M analyzer
77
9.5.2 Maintaining the total pressure gauge
79
9.6 Maintaining the gas inlet system of the OmniStar
80
9.6.1 Removing the gas inlet flange
81
9.6.2 Replacing the screen
82
9.6.3 Replacing the interior gas guide and screen
82
9.6.4 Installing the gas inlet flange
82
9.7 Maintaining the gas inlet system of the ThermoStar
83
9.7.1 Removing the gas inlet flange
84
9.7.2 Replacing the screen
85
9.7.3 Replacing the interior gas guide and screen
85
9.7.4 Installing the gas inlet flange
85
9.8 Servicing the capillary
86
9.8.1 Shorten the stainless steel capillary
86
9.8.2 Replace the stainless steel capillary
87
9.8.3 Trimming the quartz capillary
88
9.8.4 Replace the quartz capillary
89
9.9 Maintaining the heating units
90
9.9.1 Replacing the capillary hose
91
9.9.2 Maintaining the gas inlet heating
91
9.9.3 Servicing the vacuum chamber heating
91
9.10 Maintaining the electronic components
91
9.10.1 Replacing the display
91
9.10.2 Replacing the PoE injector
92
9.10.3 Replacing the mainboard
92
9.10.4 Replacing the power supply pack
92
9.10.5 Replacing the QME 250 electronic unit
92
9.10.6 Replacing the TC 110 electronic drive unit on the turbopump
92
9.11 Maintaining the calibration unit
93
9.11.1 Refilling with calibration medium
93
9.11.2 Replacing the calibration valve
93
9.12 Additional maintenance work for the corrosive gas version
94
9.12.1 Replacing the sealing gas valve
94
9.12.2 Replacing the manual pressure regulator
95
9.12.3 Replacing the digital pressure regulator
95
10 Troubleshooting
96
11 Shipping
100
12 Recycling and disposal
101
12.1 General disposal information
101
12.2 Dispose of a gas analysis system
101
13 Service solutions by Pfeiffer Vacuum
102
14 Spare parts
104
15 Special tool
105
16 Accessories
106
16.1 Accessory information
106
16.2 Ordering accessories
106
17 Technical data and dimensions
107
17.1 General
107
17.2 Technical data
107
17.3 Dimensions
111
Certification
112
Declaration of conformity
113
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Pfeiffer Vacuum GSD 350 Specifications
General
Brand
Pfeiffer Vacuum
Model
GSD 350
Category
Measuring Instruments
Language
English
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