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General| Type | Quadrupole Mass Spectrometer |
|---|---|
| Power Supply | 100-240 V AC, 50/60 Hz |
| Mounting Flange | DN 40 CF |
| Interface | RS-232, Ethernet |
| Detection Limit | 1x10^-14 mbar |
| Measurement Modes | Partial pressure measurement, Total pressure measurement |
| Applications | Vacuum process monitoring, Leak detection, Residual gas analysis |
| Resolution | Unit mass resolution |
| Ion Source | Electron Impact (EI) |
| Detector | Faraday cup / Secondary electron multiplier |
| Detectable Gases | All gases and vapors |
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