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Type | Quadrupole Mass Spectrometer |
---|---|
Power Supply | 100-240 V AC, 50/60 Hz |
Mounting Flange | DN 40 CF |
Interface | RS-232, Ethernet |
Detection Limit | 1x10^-14 mbar |
Measurement Modes | Partial pressure measurement, Total pressure measurement |
Applications | Vacuum process monitoring, Leak detection, Residual gas analysis |
Resolution | Unit mass resolution |
Ion Source | Electron Impact (EI) |
Detector | Faraday cup / Secondary electron multiplier |
Detectable Gases | All gases and vapors |