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QMA 125
Pfeiffer Vacuum QMA 125 User Manual
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Operating Instructions
BG 805 988 BE (2004-04)
1
Quadrupole Analyzer
QMA 125
2
Table of Contents
Product Identification
2
Validity
2
Intended Use
2
Table of Contents
3
Safety
5
Symbols Used
5
Personnel Qualifications
5
General Safety Instructions
5
Liability and Warranty
6
Training
6
Description
7
System Structure
7
Ion Sources
7
Axial Beam Ion Source
8
Gas-Tight Ion Source
9
UHV Grid Ion Source
9
Crossbeam Ion Source
9
Cathode Materials
10
Mass Filter
10
Ion Detectors
11
Faraday Cup
11
SEM 217 Secondary Electron Multiplier with Discrete Dynodes
12
Ion Deflection Unit (for SEM 90° Operation)
13
Technical Data
14
Installation
16
Preparation
16
Installing the Analyzer
17
Mounting Orientation
17
Ep 422
19
Cp 400
19
Removing / Installing the SEM Connector Plate
19
Electrical Connections
19
Start up
22
First Time Operation
22
Operation with Faraday Cup
22
Operation with the C-SEM or SEM
23
Settings
23
Axial Beam Ion Source (also Applies to Gas-Tight Version)
24
Grid Ion Source
25
Crossbeam Ion Source
25
C-Sem
26
Analyzer with 90°Off-Axis SEM
26
DEGAS Mode
27
Operating - and Bakeout Temperatures
27
Maintenance
28
General
28
Removing and Cleaning the Ion Sources
29
Mounting Tool
30
Axial Beam Ion Source (also Applies to Gas-Tight Version)
31
Grid Ion Source
32
Crossbeam Ion Source
33
Removing and Cleaning the Mass Filter
33
Analyzer with Faraday Cup
33
Analyzer with C-SEM
34
Analyzer with 90° SEM
35
Taking Apart the Mass Filter
36
Cleaning the Rod System
37
Cleaning the C-SEM
37
Cleaning the SEM 217
37
Repair
38
Replacing the Filament
39
Axial Beam Ion Source (also Applies to Gas-Tight Version)
39
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Pfeiffer Vacuum QMA 125 Specifications
General
Brand
Pfeiffer Vacuum
Model
QMA 125
Category
Measuring Instruments
Language
English
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