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QMG 422
Pfeiffer Vacuum QMG 422 User Manual
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Operating Instructions
Incl. Declaration of Conformity
BG 805 983 BE (0112)
1
QMG 422 Analyzers
2
Table of Contents
Default Chapter
2
Product Identification
2
Validity
2
Intended Use
2
Table of Contents
3
1 Safety
5
Symbols Used
5
Personnel Qualifications
5
General Safety Instructions
5
Liability and Warranty
6
2 Description
7
Design
7
Ion Sources
8
Mass Filter
8
Secondary Electron Multiplier
9
Versions
10
Cathode Materials
10
Electron Collimation Magnet
11
90° Deflection
11
Faraday Cup
12
Isolated Design
12
Vacuum Annealed QMA
13
Extraction Hood
13
Beam Deflection Device
13
Differential Pumping
13
3 Technical Data
14
4 Installation
17
Preparation
17
Installing the Electron Collimation Magnets
20
Installation
21
Gas Inlet System
22
Qmh 400/410
22
Ep 422
22
Cp 400
23
Removing / Installing the SEM Connector Plate
23
Mounting the Protective Tubes
23
Cabling
23
5 Operation
24
First Time Operation
24
High Temperature Operation
25
Baking the Analyzer
25
Removing the Connector Plates
26
Mounting the Connector Plates
26
Assessing the Sensitivity
26
Secondary Electron Multiplier SEM
27
Contamination
27
Low Partial Pressures
27
Gain Factor
27
Surface Ions
28
Degas
28
6 Optimization
29
Recommended Operating Modes
29
Test Gas
30
Ion Source Parameters
31
Emission
31
Protection
31
V1 Ionref
31
V2 Cathode
32
V3 Focus
32
V4 Field Axis
32
V5 Extraction
33
V8 Reserve
33
V9 Wehnelt
33
V6 / V7 Deflection
33
Resolution
34
RF Cable Polarity
34
7 Ion Sources
35
Axial Ion Source
35
Crossbeam Ion Source
37
Grid Ion Source
41
Two Lens Ion Optics
43
Crossbeam Ion Source with Two Lens Ion Optics
46
Three Lens Ion Optics
48
Crossbeam Ion Source with Three Lens Ion Optics
51
8 Maintenance and Spare Parts
54
9 Disposal
54
Appendix
55
A: Literature
55
Declaration of Contamination
56
Declaration of Conformity
57
4
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Pfeiffer Vacuum QMG 422 Specifications
General
Brand
Pfeiffer Vacuum
Model
QMG 422
Category
Measuring Instruments
Language
English
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