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Pfeiffer Vacuum
Measuring Instruments
PKR 360
Pfeiffer Vacuum PKR 360 User Manual
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OPERATING INSTRUCTIONS
EN
Translation of the Original
PKR 36X
∣
IKR 36X
Pirani/cold cathode gauge
∣
Cold cathode gauge
2
Table of Contents
Default Chapter
3
Table of Contents
3
1 About this Manual
7
Validity
7
Applicable Documents
7
Variants
7
Tbl. 1: Applicable Documents
7
Tbl. 2: PKR Variants Low Voltage
7
Tbl. 3: PKR Variants High Current
7
Target Group
8
Conventions
8
Instructions in the Text
8
Tbl. 4: IKR Variants Low Voltage
8
Tbl. 5: IKR Variants High Current
8
Pictographs
9
Stickers on the Product
9
Abbreviations
9
Tbl. 6: Abbreviations Used
9
Trademarks
10
2 Safety
11
General Safety Instructions
11
Safety Instructions
11
Safety Precautions
14
Proper Use
15
Foreseeable Improper Use
15
Responsibilities and Warranty
15
Owner Requirements
15
Personnel Qualification
15
Ensuring Personnel Qualification
16
Personnel Qualification for Maintenance and Repair
16
Advanced Training with Pfeiffer Vacuum
16
Operator Requirements
17
3 Transportation and Storage
18
4 Product Description
19
Identifying the Product
19
Scope of Delivery
19
Function
19
Fig. 1: PKR Measuring Configuration
19
5 Installation
20
Establishing the Vacuum Connection
20
Removing/Installing the Electronic Unit
21
Fig. 2: Establishing the Vacuum Connection
21
Fig. 3: Removing/Installing the Electronic Unit (Recommended for CF-F)
22
Establishing the Electrical Connection
23
Fig. 4: Connection Diagram
23
Fig. 5: Measurement Cable and Hirschmann Cable Socket
24
6 Operation
25
Status Display
25
Tbl. 7: Illuminating Diodes PKR
25
Fig. 6: Status Display
25
Relation: Measuring Signal and Pressure
26
Tbl. 8: Illuminating Diodes IKR
26
Tbl. 9: Operating Modes PKR
26
Fig. 7: Relation: Measuring Signal and Pressure PKR
26
Tbl. 10: Constants PKR
27
Fig. 8: Relation: Measuring Signal and Pressure IKR
27
Gas Type Dependence
28
Tbl. 11: Constants IKR
28
Fig. 9: Pressure Range > 10 Hpa with Solely Pirani Operation PKR
28
Fig. 10: Pressure Range from 10 to 0.1 Hpa PKR
29
Fig. 11: Displayed Pressure IKR
30
Ignition Delay
31
Contamination
31
Tbl. 12: Calibration Factors for the Pressure Range < 10 Hpa PKR and IKR
31
7 Disassembly
33
Fig. 12: Disassembling the Gauge
33
8 Maintenance
35
Calibrating the PKR Gauge
35
Maintaining the IKR Gauge
36
Fig. 13: Calibrating the PKR Gauge
36
Disassembling the Gauge
37
Fig. 14: Disassembling the Gauge
37
Replacing the Ignition Aid
38
Fig. 15: Removing the Ignition Aid
38
Fig. 16: Inserting the Ignition Aid in the Mounting Tool
39
Fig. 17: Inserting the Ignition Aid
39
Cleaning of Components
40
Identifying Errors at the Measurement Chamber
41
Tbl. 13: Measurement PKR
41
Tbl. 14: Measurement IKR
41
Fig. 18: Contact Pins of the Measurement Chamber
41
Assembling the Gauge
42
Fig. 19: Switch for Calibration Value CAL
42
Fig. 20: Assembling the Gauge
43
9 Malfunctions
44
Tbl. 15: Malfunctions PKR
44
Tbl. 16: Malfunctions IKR
45
10 Shipping
46
11 Disposal
47
12 Service Solutions from Pfeiffer Vacuum
48
13 Ordering Information
50
Ordering Parts
50
Spare Parts
50
Tbl. 17: Spare Parts
50
Fig. 21: Complete Measurement Chamber (Replacement Sensor)
50
Accessories
51
14 Technical Data and Dimensions
52
Tbl. 18: Measuring and Pressure Values PKR
52
Tbl. 19: Measuring and Pressure Values IKR
52
Tbl. 20: Electrical Data PKR
53
Tbl. 21: Electrical Data IKR
54
Tbl. 22: Internal Volume and Weight
54
Tbl. 23: Ambient Conditions
54
Tbl. 24: Temperatures
55
Tbl. 25: Material against Vacuum
55
Fig. 22: Dimensions
55
15 Appendix
56
Units of Pressure
56
Gas Throughputs
56
Tbl. 26: Units of Pressure and Their Conversion
56
Tbl. 27: Gas Throughputs and Their Conversion
56
ETL Listed PKR
57
ETL Listed IKR
58
Declaration of Conformity PKR
59
Declaration of Conformity IKR
60
4
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Pfeiffer Vacuum PKR 360 Specifications
General
Brand
Pfeiffer Vacuum
Model
PKR 360
Category
Measuring Instruments
Language
English
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