Pfeiffer Vacuum HIQUAD QMG 700 User Manual

6
System Overview
2 System Overview
System components The QMG 700 comprises of the controller QMS 700 (system chassis SC 700 including
the modules: QC 700, FB 711, IS 716, HV 701, HV 702, and IO 700). From the 42x
system the modules RF generators (QMH 4xx-x), analyzers (QMA 4x0), the
electrometer preamplifier (EP 422), and the ion counter preamplifier CP 400 are utilized
as well.
System structure
QMG 700
The following block diagram shows the general QMG 700 system structure. Depending
on the application, various configurations are possible.
For ion counting the electrometer preamplifier EP 422 is replaced by the ion counter
preamplifier CP 400.
Individual modules are described in detail on the following pages.The block diagram
below shows a configuration example.
SEM or CD-SEM
QMA 4x0
Ion source
Mass filter
Faraday collector
Ion Supply
IS 716
High Voltage
Supply
HV 70x
Preamp
EP 422 (2)
Preamp
EP 422 (1)
Ion counter
CP 400
Power supply
(SC 700)
I/O System
IO 700
QMS 700
Field Bus
FB 711
(Option)
Quadrupole
Controller
QC 700
Field bus
PC
PC link
(Ethernet / USB)
DI AI DO AO Bus
IN
Bus
Out
Mains
AC
(90° ion deflec-
tion unit)
RF generator
QMH 4xx

Pfeiffer Vacuum HIQUAD QMG 700 Specifications

General

Brand	Pfeiffer Vacuum
Model	HIQUAD QMG 700
Category	Laboratory Equipment
Language	English