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IMR 265
Pfeiffer Vacuum IMR 265 - User Manual
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BG 5172 BEN / B
(
2017-02
)
OPERATING INSTRUCTIONS
Translation of the original ins
tructions
IMR 265
Compact Process Ion Gauge
2
Table of Contents
Main Page
Default Chapter
2
Product Identification
2
Validity
2
Intended Use
2
Functional Principle
2
Table of Contents
3
1 Safety
4
Symbols Used
4
Personnel Qualifications
4
General Safety Instructions
4
Liability and Warranty
4
2 Technical Data
5
3 Installation
9
Vacuum Connection
9
Removing and Installing the Electronics Unit
11
Power Connection
12
Use with a Measurement and Control Unit for Compact Gauges
12
Use with Other Control Devices
12
4 Operation
14
Measuring Principle, Measuring Behavior
14
Operational Principle of the Gauge
17
5 Maintenance
18
Adjusting the Gauge
18
Adjusting the Calibration Setting of the Hot Cathode System
19
Cleaning the Gauge
19
Replacing the Baffle
20
Replacing the Sensor
21
What to Do in Case of Problems
21
6 Deinstallation
22
7 Returning the Product
23
8 Options
23
9 Spare Parts
24
10 Disposal
24
Appendix
25
A: Conversion Table for Pressure Units
25
B: Relationship Output Signal - Pressure
25
C: Gas Type Dependence
26
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Pfeiffer Vacuum IMR 265 Specifications
General
Brand
Pfeiffer Vacuum
Model
IMR 265
Category
Measuring Instruments
Language
English
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