Contents
MN025 / v2.1.0 3-Axis Subsystems for Laser Beam Deflection 3
CONTENTS
1 BASIC SAFETY INSTRUCTIONS .................................................................................. 5
1.1 Laser safety ..................................................................................................................... 5
1.2 Laser shutter.................................................................................................................... 5
1.3 Signs ................................................................................................................................ 6
1.4 Classification of laser devices ......................................................................................... 7
1.5 Laser area ....................................................................................................................... 8
1.6 Special hazards caused by mirrors made of beryllium ................................................... 9
1.7 Special hazards caused by lenses made of zinc selenide .............................................. 9
2 BASIC INFORMATION ................................................................................................. 10
2.1 Introduction .................................................................................................................... 10
2.2 Intended use .................................................................................................................. 10
2.3 Package contents .......................................................................................................... 10
2.4 Module overview ........................................................................................................... 11
2.5 Warranty ........................................................................................................................ 12
2.6 Manufacturer ................................................................................................................. 12
2.7 Customer Service .......................................................................................................... 12
2.8 Status LED of the linear translator module ................................................................... 13
2.8.1 Analog linear translator modules ................................................................................... 13
2.8.2 Digital linear translator modules .................................................................................... 13
2.9 Status LEDs of the deflection unit ................................................................................. 14
2.9.1 Analog deflection units .................................................................................................. 14
2.9.2 Digital deflection units ................................................................................................... 14
3 TECHNICAL DATA ....................................................................................................... 15
3.1 Rating plate code .......................................................................................................... 15
3.1.1 Deflection Unit ............................................................................................................... 16
3.1.2 Linear Translator Module .............................................................................................. 17
3.1.3 Linear Translator Module (FOCUSSHIFTER) ............................................................... 17
3.2 Conformity with directives ............................................................................................. 18
4 FUNCTIONAL DESCRIPTION ..................................................................................... 19
4.1 Laser beam subsystem ................................................................................................. 19
4.2 Functional principle of analog subsystems ................................................................... 20
4.3 Functional principle of digital subsystems ..................................................................... 21
4.4 Protection window ......................................................................................................... 26
4.5 F-Theta lens .................................................................................................................. 27
4.6 Interfaces of the linear translator module ...................................................................... 28
4.6.1 Analog input................................................................................................................... 28
4.6.2 Digital input .................................................................................................................... 29
4.6.3 Power supply ................................................................................................................. 30
4.6.4 Stepper motor interface ................................................................................................. 31
4.6.5 Digital output.................................................................................................................. 32
4.7 Interfaces of the deflection unit ..................................................................................... 33
4.7.1 Analog input................................................................................................................... 33
4.7.2 Power supply ................................................................................................................. 34
4.7.3 Digital interface .............................................................................................................. 35
5 INSTALLATION ............................................................................................................ 36
5.1 Installing the linear translator module ........................................................................... 37
5.2 Requirements to the cooling water ................................................................................ 37
5.3 Requirements to the cooling air..................................................................................... 37