3613
[LD Power Control]
Displays LD Power determined by ProCon.
001 Std Speed: K *ENG [60 to 180 / 90 / 1%/step]
002 Std Speed: C *ENG [60 to 180 / 90 / 1%/step]
003 Std Speed: M *ENG [60 to 180 / 95 / 1%/step]
004 Std Speed: Y *ENG [60 to 180 / 95 / 1%/step]
101 Procon:Std Speed: K *ENG [60 to 180 / 90 / 1%/step]
102 Procon:Std Speed: C *ENG [60 to 180 / 90 / 1%/step]
103 Procon:Std Speed: M *ENG [60 to 180 / 95 / 1%/step]
104 Procon:Std Speed: K *ENG [60 to 180 / 95 / 1%/step]
3620 [ProCon Target M/A]
001
Maximum M/A:K *ENG
[0.250 to 0.750 / 0.378 /
0.001mg/cm2/step]
Sets Coverage M/A (K).
002
Maximum M/A:C *ENG
[0.250 to 0.750 / 0.433 /
0.001mg/cm2/step]
Sets Coverage M/A (C).
003
Maximum M/A:M *ENG
[0.250 to 0.750 / 0.433 /
0.001mg/cm2/step]
Sets Coverage M/A (M).
004
Maximum M/A:Y *ENG
[0.250 to 0.750 / 0.433 /
0.001mg/cm2/step]
Sets Coverage M/A (Y).
011
Maximum M/A Adj.:K *ENG [-5 to 5 / 0 / 1/step]
Sets Maximum M/A Adj. (K) [Operator Adjustment Item].
012
Maximum M/A Adj.:C *ENG [-5 to 5 / 0 / 1/step]
Sets Maximum M/A Adj. (C) [Operator Adjustment Item].
SP3-XXX (Process)
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