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| Category | Controller |
|---|---|
| Model | MFC-S3B-F |
| Type | Mass Flow Controller |
| Manufacturer | SANKI |
| Accuracy | ±1.0% of Full Scale |
| Linearity | ±0.5% of Full Scale |
| Repeatability | ±0.2% of Full Scale |
| Operating Pressure Range | 0.1 to 0.5 MPa |
| Input Signal | 0-5 VDC |
| Output Signal | 0-5 VDC |
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