１．Introduction ２
２．Before Using ２
３．Precautions for Safety ２
４．Name of Each Part ４
５．First-Time Use ６
６．Input/Output Connections ７
７．Operation Panel １２
7-1．Explanation of Operation Panel
7-2．Displayed Mode
7-3．Setting Function
7-4．Preparation for Operation
８．Operation and Amplitude Adjustment Method １６
９．Added Function ２３
9-1．Soft start and soft stop functions
9-2．Overflow Sensor Timer Function
9-3．Operation Signal Delay Output Timer Function
9-4．Output Voltage Limit Setting
10．”io” Mode Setting Function ２４
11．Remote Unit（RCU-3A） ２５
12．Parameter Setting Method ２６
13．Guard and Alert ２８
14．Troubleshooting ２９
15．Options ２９
16．Specifications ３０
17．Outside Dimensional Drawing ３１
18．Warranty ３２
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