Shimadzu TMP-3203LM User Manual

263-13236E
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Magnetically Levitated Turbo Molecular Pump
Model:TMP-3203M （Air cooled type）
Model:TMP-3203MC （Air cooled chemical type）
Model:TMP-3203LM （Wide range type）
Model:TMP-3203LMC （Wide range chemical type）
Model:TMP-3403LMC （Wide range chemical type）
INSTRUCTION MANUAL

Shimadzu TMP-3203LM Specifications

General

Brand	Shimadzu
Model	TMP-3203LM
Category	Water Pump
Language	English