Shimadzu TMP-3203LM - User Manual

263-13236E
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Magnetically Levitated Turbo Molecular Pump
Model:TMP-3203M （Air cooled type）
Model:TMP-3203MC （Air cooled chemical type）
Model:TMP-3203LM （Wide range type）
Model:TMP-3203LMC （Wide range chemical type）
Model:TMP-3403LMC （Wide range chemical type）
INSTRUCTION MANUAL

Shimadzu TMP-3203LM Specifications

General

Brand	Shimadzu
Model	TMP-3203LM
Category	Water Pump
Language	English

Summary

Precautions for Safe Operation

Installation Precautions

Part Replacement

Section 1 OUTLINE AND DESCRIPTIONS

Section 2 IDENTIFICATION AND FUNCTION

2.1 Pump Main Unit

Section 3 CONSTRUCTION AND PRINCIPLE

3.1 Pump Construction

3.2 Principle of Turbo Molecular Pumping

Describes the fundamental operating principle of turbo molecular pumping.

Section 4 SPECIFICATIONS

4.1 Pump Main Unit

Provides detailed specifications for the TMP main units, including performance data.

Section 5 INSTALLATION

5.1.1 Pump Mounting Direction

5.1.2 Installation of the Pump

Detailed instructions and warnings for physically installing the pump.

5.2 Connection of the Pump to the Power Supply Unit

Guidance on connecting the pump to its power supply unit.

5.3 Interlock for Vacuum System

Section 6 OPERATION

6.2 Start-up Preparation

Steps required to prepare the pump for start-up.

6.3 Start-up

Procedure for starting the turbo molecular pump.

6.4 Shutting Down

Steps for safely shutting down the turbo molecular pump.

6.5 Baking Operation

Section 7 GAS PURGE

Section 8 TURBO MOLECULAR PUMP RECONDITION

8.1 Turbo Molecular Pump Return Request

8.2 Turbo Molecular Pump Decontamination

8.3 Touch-Down Bearing Replacement

8.4 Check of the rotor blades

Section 9 TROUBLESHOOTING

9.1 Vacuum Pressure Rise

Explanation of causes for rapid vacuum pressure rise and alarms.

9.2 Abnormal Noise and;or Vibration

Guidance on abnormal noise/vibration and when to stop operation.