Shimadzu TMP-3403LMC - User Manual

263-13236E
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Magnetically Levitated Turbo Molecular Pump
Model:TMP-3203M （Air cooled type）
Model:TMP-3203MC （Air cooled chemical type）
Model:TMP-3203LM （Wide range type）
Model:TMP-3203LMC （Wide range chemical type）
Model:TMP-3403LMC （Wide range chemical type）
INSTRUCTION MANUAL

Shimadzu TMP-3403LMC Specifications

General

Brand	Shimadzu
Model	TMP-3403LMC
Category	Water Pump
Language	English

Summary

Section 1 OUTLINE AND DESCRIPTIONS

Section 2 IDENTIFICATION AND FUNCTION

2.1 Pump Main Unit

Identifies key components of the pump main unit with diagrams.

Section 3 CONSTRUCTION AND PRINCIPLE

3.1 Pump Construction

Explains the internal structure of the magnetic bearing type turbo molecular pump.

3.2 Principle of Turbo Molecular Pumping

Describes the physics behind turbo molecular pumping operation.

Section 4 SPECIFICATIONS

4.1 Pump Main Unit Specifications

Detailed specifications for TMP-3203 series pumps.

Section 5 INSTALLATION

Installation Procedures and Guidelines

Section 6 OPERATION

Start-up, Shut-down, and Baking

Details start-up preparation, sequence, shutdown, and baking procedures.

Section 7 GAS PURGE

Section 8 TURBO MOLECULAR PUMP RECONDITION

Return Request and Decontamination

Section 9 TROUBLESHOOTING

Vacuum Pressure Rise

Describes how a rapid vacuum pressure rise triggers braking and alarms.

Abnormal Noise and Vibration