Shimadzu TMP-3403LMC - Pump Main Unit

SECTION 2 IDENTIFICATION AND FUNCTION
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263-13236
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2.1 Pump Main Unit
TMP-3203LM/LMC TMP-3403LMC
TMP-3203M/MC
Fig.2-1 Pump Main Unit
(1) INLET FLANGE. . . . . . . . . . . . . Inlet flange, joint the turbo molecular pump, VG350,
ISO320B Special, VG30, VG250 are also available.
(2) PORT FOR GAS PURGE . . . . . Gas purge adaptor port
(see Section 7 "GAS PURGE")
(3) OUTLET FLANGE. . . . . . . . . . . Outlet flange, connect a backing vacuum pump or its
related pipe connection, KF40.
(4) MOTOR CONNECTOR. . . . . . . Motor cable receptacle
(5) CONTROL CONNECTOR. . . . . Control cable receptacle
(6) COOLING WATER PIPELINE. . Cooling water pipe connector, Rc1/4
(7) COOLING FAN . . . . . . . . . . . . . Cooling Fan
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