SECTION 2 IDENTIFICATION AND FUNCTION
8
263-13236
2
2.1 Pump Main Unit
TMP-3203LM/LMC TMP-3403LMC
TMP-3203M/MC
Fig.2-1 Pump Main Unit
(1) INLET FLANGE. . . . . . . . . . . . . Inlet flange, joint the turbo molecular pump, VG350,
ISO320B Special, VG30, VG250 are also available.
(2) PORT FOR GAS PURGE . . . . . Gas purge adaptor port
(see Section 7 "GAS PURGE")
(3) OUTLET FLANGE. . . . . . . . . . . Outlet flange, connect a backing vacuum pump or its
related pipe connection, KF40.
(4) MOTOR CONNECTOR. . . . . . . Motor cable receptacle
(5) CONTROL CONNECTOR. . . . . Control cable receptacle
(6) COOLING WATER PIPELINE. . Cooling water pipe connector, Rc1/4
(7) COOLING FAN . . . . . . . . . . . . . Cooling Fan
2
1
5
4
3
6
26
1
5
4
3
1
5
4
3 2 7
To Next Page
Loading...
Need help?
General
