8.2 Turbo Molecular Pump Decontamination
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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
8
8.2 Turbo Molecular Pump Decontamination
All expenses incurred with the decontamination of the turbo molecular pump are the
responsibility of the customer.
8.3 Touch-Down Bearing Replacement
The touch-down bearing (Fig. 3-1 (9)) is the only component of Shimadzu's turbo molecular
pump that is subjected to friction and wear, normally occurring only during electrical power
failure. Repeated and/or frequent rotor touch down will cause wear and bigger rotational
resistance and require replacement of touch down bearings.
Shimadzu recommends replacement of the touch-down bearing by Shimadzu or an approved
service company.
8.4 Check of the rotor blades
Rotor blades of turbo molecular pump are high-speed rotor made of aluminum alloy. It has the
possibility that material strength deteriorates, specially when corrosive gas is evacuated. Regular
check (Customer is liable for the cost.) by Shimadzu or a Shimadzu approved/authorized service
center is suggested. (Every one year is recommended.) Shimadzu and/or the service center
perform fluorescence penetrant testing of rotor blades in every overhaul task and check and
suggest a rotor replacement to customers if any cracks are found out.
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