Name: Shimadzu TMP-3403LMC
Brand: Shimadzu
Rating: 5 (1 reviews)

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1.2　Descriptions

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

1.2 Descriptions

1.2.1 Outside drawing of Pump Main Unit

1.2.1.1 Outside drawing of series of TMP-3203

Fig.1-1

　TMP-3203M and TMP-3203MC

INLET

FLANGE

Parts number

ABCEF G φH φJn-φd

TMP-3203M TMP-3203MC

VG350 P/N 262-78430-62 P/N 262-78430-72 287 294 289 375 420 22

φ450 φ420 12-φ15

ISO320B

Special

P/N 262-78430-63 P/N 262-78430-73 287 294 289 375 420 22.5

φ425 φ395 12-φ13

VG300 P/N 262-78430-67 P/N 262-78430-77 307 314 309 395 440 18.5

φ400 φ370 12-φ13

VG250 P/N 262-78430-68 P/N 262-78430-78 331 338 333 419 464 18.5

φ350 φ320 12-φ13

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Shimadzu TMP-3403LMC Specifications

General