5.1 Installation
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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
5
5.1.2 Installation of the Pump
WARNING
・Fix the pump to the device according to 5.1.2.1 and 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・The device should be fixed to the floor so as not to move. The device should be designed to
endure the torque 1.5 times the rapid shutdown torque to take the safety margin in
preparation for an emergency accident.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.The
pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation.
This pump is not connected to grand. Please provide PE(Protective earth) connection to the
chassis of pump in final application.
NOTICE
Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without
fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump
would cause failure of adequate vacuuming performance.
When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum
pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1 G /
50 Hz max at the outlet connection port of the turbo molecular pump.)
This pump is a precision pump. To protect the pump from torsion due to external piping load,
use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.
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