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Shimadzu TMP-3203MC User Manual

Shimadzu TMP-3203MC
62 pages
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263-13236E
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Magnetically Levitated Turbo Molecular Pump
Model:TMP-3203M Air cooled type
Model:TMP-3203MC Air cooled chemical type
Model:TMP-3203LM Wide range type
Model:TMP-3203LMC Wide range chemical type
Model:TMP-3403LMC Wide range chemical type
INSTRUCTION MANUAL
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Shimadzu TMP-3203MC Specifications

General IconGeneral
BrandShimadzu
ModelTMP-3203MC
CategoryWater Pump
LanguageEnglish

Summary

Introduction

Document Copyrights and Disclaimers

Outlines document copyright and disclaimer information from Shimadzu.

Precautions for Safe Operation

Safety Warning Symbols Explained

Explains the meaning of WARNING, CAUTION, and NOTICE symbols used in the manual.

Key Safety Warnings and Precautions

Highlights critical safety warnings regarding repair, modification, and system compatibility.

Section 1 OUTLINE AND DESCRIPTIONS

Outline of Turbo Molecular Pump

Provides a general overview of the turbo molecular pump and its applications.

Product Descriptions and Drawings

Details the physical descriptions, including outside drawings of different models.

Section 2 IDENTIFICATION AND FUNCTION

Pump Main Unit Identification

Identifies the main components of the turbo molecular pump unit with numbered labels.

Section 3 CONSTRUCTION AND PRINCIPLE

Pump Construction Details

Explains the internal construction, including magnetic bearings and rotor/stator blades.

Principle of Turbo Molecular Pumping

Describes the fundamental working principle of turbo molecular pumps.

Section 4 SPECIFICATIONS

Pump Main Unit Specifications

Lists detailed technical specifications for different TMP models.

Fulfilled Safety and EMC Standards

Enumerate the safety and EMC standards the product conforms to.

Section 5 INSTALLATION

Installation Procedures and Guidelines

Covers mounting direction, pump installation, piping, and center of gravity.

Pump to Power Supply Connection

Details the correct procedure for connecting the pump to its power supply unit.

Vacuum System Interlock Setup

Explains interlocks for vacuum systems, including backing pump and cooling water.

Section 6 OPERATION

Operation Manual Overview

Provides a brief overview of the operation section and refers to the power supply manual.

Start-up and Shutdown Procedures

Details steps for preparing, starting, and shutting down the turbo molecular pump.

Baking Operation Guidelines

Describes the process and precautions for baking the turbo molecular pump.

Section 7 GAS PURGE

Gas Purge Method and Adaptors

Explains the use of gas purge for protecting bearings and details purge adaptors.

Section 8 TURBO MOLECULAR PUMP RECONDITION

Turbo Molecular Pump Return Request

Outlines requirements and precautions for returning the pump for service.

Pump Decontamination Responsibility

States that decontamination expenses are the customer's responsibility.

Touch-Down Bearing Replacement

Recommends replacement of touch-down bearings by authorized services.

Rotor Blades Inspection and Replacement

Suggests regular inspection of rotor blades, especially after corrosive gas use.

Section 9 TROUBLESHOOTING

Troubleshooting: Vacuum Pressure Rise

Explains that rapid vacuum pressure rise triggers braking and alarm lights.

Troubleshooting: Noise and Vibration

Addresses abnormal noise/vibration, noting potential causes like touch-down bearing sound.

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