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Shimadzu TMP-3203MC - Section 8 TURBO MOLECULAR PUMP RECONDITION; Turbo Molecular Pump Return Request; Pump Decontamination Responsibility; Touch-Down Bearing Replacement

Shimadzu TMP-3203MC
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8
8TURBO MOLECULAR
PUMP RECONDITION
8.1　Turbo Molecular Pump Return Request
8.2　Turbo Molecular Pump Decontamination
8.3　Touch-Down Bearing Replacement
8.4　Check of the rotor blades

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