Shimadzu TMP-3203MC - Descriptions; Outside Drawing of Pump Main Unit; Outside Drawing of Series of TMP-3203

1.2 Descriptions
3
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
1
1.2 Descriptions
1.2.1 Outside drawing of Pump Main Unit
1.2.1.1 Outside drawing of series of TMP-3203
Fig.1-1
TMP-3203M and TMP-3203MC
INLET
FLANGE
Parts number
ABCEF G φH φJn-φd
TMP-3203M TMP-3203MC
VG350 P/N 262-78430-62 P/N 262-78430-72 287 294 289 375 420 22
φ450 φ420 12-φ15
ISO320B
Special
P/N 262-78430-63 P/N 262-78430-73 287 294 289 375 420 22.5
φ425 φ395 12-φ13
VG300 P/N 262-78430-67 P/N 262-78430-77 307 314 309 395 440 18.5
φ400 φ370 12-φ13
VG250 P/N 262-78430-68 P/N 262-78430-78 331 338 333 419 464 18.5
φ350 φ320 12-φ13