SECTION 5 INSTALLATION
24
263-13236
5
5.1.3 Example of piping connection
Connect a backing vacuum pump or its related pipe connection flange to the outlet flange of
the pump. (See Fig. 5-6)
＊ marks are not attached to this turbo molecular pump set.
Fig. 5-6 Example of Exhaust Line
When gas purge required, connect the gas purge pipeline to the gas purge port. (For the gas
purge detail, see Section 7 "Gas Purge")
After complete piping connection, check for perfect airtightness by helium leak test.
＊
VACUUM CHAMBER
＊
MAIN VALVE
TURBO MOLECULAR PUMP
＊
FOREVACUUM VALVE
＊
BACKING VACUUM
PUMP
＊
FLEXIBLE TUBE
To Next Page
Loading...
