Shimadzu TMP-3203MC User Manual

SECTION 5 INSTALLATION
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5
5.1 Installation
5.1.1 Pump Mounting Direction
This turbo molecular pump can be installed in vertical, the horizontal, inverted, oblique position.
The outlet flange of the pump should face horizontally or vertically when installing the pump
horizontally and obliquely.
When an installation direction is non-appropriate, reliability of operation may deteriorate.
(Refer to Fig. 5-1)
Fig. 5-1 Mounting Direction of Magnetic Levitated Turbo Molecular Pump
Inverted position
Oblique position
Horizontal
position
Vertical position
Vacuum
chamber
gravity
direction
Horizontal position
Vertical position
Outlet
Outlet
downward
upward
gravity
direction
Oblique position

Shimadzu TMP-3203MC Specifications

General

Brand	Shimadzu
Model	TMP-3203MC
Category	Water Pump
Language	English